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The sputter deposition/ nanoscale patterning suite consists of an AJA sputter deposition system for the automated growth of metallic heterostructures for devices and a Zeiss Cross-beam 540 focused ion beam/electron beam system for in-situ patterning and device fabrication. This will provide a unique capability for 3D heterostructure fabrication which can generate novel magnetic and optical materials systems.

It will operate in association with the sputtering MBE capability of the Royce PVD suite.

Date at which we expect this equipment to be operational: early 2018.

If your research interests require characterisation of your materials or devices using Physical Vapour Deposition (PVD), or you would like to discuss opportunities for such characterisation please contact Professor Mark BlamireĀ mb52@cam.ac.uk